Closed-Loop Control of Composition and Temperature During the Growth of InGaAs Lattice Matched to InP

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Date Created
1999
Agent

Long Wavelength Pseudomorphic InGaPAsSb Type-I and Type-II Active Layers Grown on GaAs

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Date Created
2000
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Real-Time Composition Control of InAlAs Grown on InP Using Spectroscopic Ellipsometry

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Date Created
2000
Agent