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Title
- Use of Spectroscopic Ellipsometry for Feedback Control During the Growth of Thin AlAs Layers
Contributors
- Beaudoin, M. (Author)
- Johnson, Shane R. (Author)
- Boonzaayer, Martin D. (Author)
- Zhang, Yong-Hang (Author)
- Johs, B. (Author)
Date Created
The date the item was original created (prior to any relationship with the ASU Digital Repositories.)
1999
Resource Type
Collections this item is in
Identifier
- Digital object identifier: 10.1116/1.590728
Note
- Copyright 1999 American Vacuum Society. Link to the original site http://scitation.aip.org/content/avs/journal/jvstb/17/3/10.1116/1.590728
Citation and reuse
Cite this item
This is a suggested citation. Consult the appropriate style guide for specific citation guidelines.
M. Beaudoin, S. R. Johnson, M. D. Boonzaayer, Y.-H. Zhang, and B. Johs, Journal of Vacuum Science & Technology B 17, 1233 (1999)