With the development of the Science and Technology Innovation Board, equity incentives have gradually evolved into the "standard configuration" for listed companies on the board in recent years. However, due to the short opening time of the Science and Technology Innovation Board in China, the equity incentive system on the board is still constantly being explored and advanced. Therefore, studying the relationship between equity incentives and corporate performance of listed companies on the Science and Technology Innovation Board is of great practical significance for promoting the long-term development of the company.Therefore, based on a systematic review of domestic and foreign research results, combined with the basic theory of equity incentives, this article selected listed companies on the Science and Technology Innovation Board in China that implemented equity incentives from January 1, 2019 to December 31, 2022 as research samples, and used equity incentives as explanatory variables. This study adopts factor analysis to evaluate corporate performance through a comprehensive index, based on the operational capability, cash flow ability, and growth potential of companies. Finally, a regression analysis model is created using current period regression, lagged one period, and lagged two periods regression methods to examine the relationship between equity incentives and corporate performance of listed companies on the Science and Technology Innovation Board. The relationship between equity incentives and R&D investment is analyzed using lagged two periods, and TobinQ is also analyzed Zscore conducted regression analysis to verify the conclusion of the relationship between equity incentives and corporate performance. Empirical research analysis shows that under comprehensive indicators, there is no significant promoting effect between equity incentives and corporate performance of companies listed on the Science and Technology Innovation Board. Compared with companies in other listed sectors, the equity incentive effect of companies listed on the Science and Technology Innovation Board is strengthened. Equity incentives of companies listed on the Science and Technology Innovation Board are conducive to improving Tobin Q performance without increasing bankruptcy risk. Equity incentives of companies listed on the Science and Technology Innovation Board can enhance R&D investment. Based on empirical research results, this article intends to provide comprehensive suggestions for better implementation of equity incentives for listed companies on the Science and Technology Innovation Board. Finally, this article proposes future research directions.