Description
This thesis discusses the yield analysis process for determining the efficacy of experimental changes to a semiconductor manufacturing line, specifically within the chemical mechanical planarization department. Three yield analysis projects were analyzed and related to relevant literature to determine how the changes might impact overall semiconductor yield.
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Title
- Planar Process Yield Improvement in Semiconductor Manufacturing
Contributors
- Richards, Andrew (Author)
- Machas, Michael (Thesis director)
- Maguregui, Edgar (Committee member)
- Barrett, The Honors College (Contributor)
- Chemical Engineering Program (Contributor)
Date Created
The date the item was original created (prior to any relationship with the ASU Digital Repositories.)
2023-05
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