Full metadata
Title
Planar Process Yield Improvement in Semiconductor Manufacturing
Description
This thesis discusses the yield analysis process for determining the efficacy of experimental changes to a semiconductor manufacturing line, specifically within the chemical mechanical planarization department. Three yield analysis projects were analyzed and related to relevant literature to determine how the changes might impact overall semiconductor yield.
Date Created
2023-05
Contributors
- Richards, Andrew (Author)
- Machas, Michael (Thesis director)
- Maguregui, Edgar (Committee member)
- Barrett, The Honors College (Contributor)
- Chemical Engineering Program (Contributor)
Topical Subject
Resource Type
Copyright Statement
In Copyright
Primary Member of
Peer-reviewed
No
Open Access
No
Series
Academic Year 2022-2023
Handle
https://hdl.handle.net/2286/R.2.N.184955
System Created
- 2023-04-14 02:31:30
System Modified
- 2023-04-25 04:46:45
- 1 year 6 months ago
Additional Formats