Full metadata
Title
Use of Spectroscopic Ellipsometry for Feedback Control During the Growth of Thin AlAs Layers
Date Created
1999
Contributors
- Beaudoin, M. (Author)
- Johnson, Shane R. (Author)
- Boonzaayer, Martin D. (Author)
- Zhang, Yong-Hang (Author)
- Johs, B. (Author)
Resource Type
Copyright Statement
In Copyright
Primary Member of
Identifier
Digital object identifier: 10.1116/1.590728
Peer-reviewed
No
Open Access
No
Series
Journal of Vacuum Science & Technology B
Handle
https://hdl.handle.net/2286/R.I.27891
Preferred Citation
M. Beaudoin, S. R. Johnson, M. D. Boonzaayer, Y.-H. Zhang, and B. Johs, Journal of Vacuum Science & Technology B 17, 1233 (1999)
Level of coding
minimal
Cataloging Standards
Note
Copyright 1999 American Vacuum Society. Link to the original site http://scitation.aip.org/content/avs/journal/jvstb/17/3/10.1116/1.590728
System Created
- 2015-02-11 01:53:25
System Modified
- 2021-06-21 06:08:05
- 3 years 4 months ago
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