Full metadata
Title
Emulation of Plasma Load by Saturation Control of Low Permeability Inductors
Description
Power amplifiers and tuneable matching networks for plasma generation systems arebeing continuously advanced, and recent innovations have shown tremendous
improvements in their size, efficiency, and capability. These improvements must
ultimately be validated on a live plasma chamber, but this is costly and time-consuming,
and debugging errors or failures is a challenge owing to the highly dynamic nature of
the plasma and the experimental prototype nature of the advancements. This work
addresses this challenge by developing a reactive load emulation system that can mimic
the inductive reactance of a live plasma chamber. This includes a study of the saturation
characteristics of low-permeability, high-frequency materials, demonstration of the
suitability of this method for plasma emulation, and the design of an inductor array
platform which verifies the approach.
Date Created
2024
Contributors
- Tagare, Darshan Ravindra (Author)
- Ranjram, Mike (Thesis advisor)
- Mallik, Ayan (Committee member)
- Ayyanar, Raja (Committee member)
- Arizona State University (Publisher)
Topical Subject
Resource Type
Extent
63 pages
Language
eng
Copyright Statement
In Copyright
Primary Member of
Peer-reviewed
No
Open Access
No
Handle
https://hdl.handle.net/2286/R.2.N.193400
Level of coding
minimal
Cataloging Standards
Note
Partial requirement for: M.S., Arizona State University, 2024
Field of study: Electrical Engineering
System Created
- 2024-05-02 01:24:53
System Modified
- 2024-05-02 01:25:00
- 6 months 3 weeks ago
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